JPH0289859U - - Google Patents

Info

Publication number

JPH0289859U

JPH0289859U JP16932588U JP16932588U JPH0289859U JP H0289859 U JPH0289859 U JP H0289859U JP 16932588 U JP16932588 U JP 16932588U JP 16932588 U JP16932588 U JP 16932588U JP H0289859 U JPH0289859 U JP H0289859U

Authority

JP

Japan

Prior art keywords

light

semiconductor

semiconductor substrate

receiving

coupling device

Prior art date

1988-12-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 239000004065 semiconductor Substances 0.000 claims description 12
• 239000000758 substrate Substances 0.000 claims description 6
• 230000008878 coupling Effects 0.000 claims 2
• 238000010168 coupling process Methods 0.000 claims 2
• 238000005859 coupling reaction Methods 0.000 claims 2
• 230000003287 optical effect Effects 0.000 claims 2
• 238000005530 etching Methods 0.000 claims 1
• 239000011368 organic material Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 5
• 230000000903 blocking effect Effects 0.000 description 2
• 239000010408 film Substances 0.000 description 2
• 238000010276 construction Methods 0.000 description 1
• 238000004519 manufacturing process Methods 0.000 description 1
• 239000002184 metal Substances 0.000 description 1
• 239000011347 resin Substances 0.000 description 1
• 229920005989 resin Polymers 0.000 description 1
• 239000010409 thin film Substances 0.000 description 1